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JM580BD Wafer Inspection Microscope

8-inch stage, darkfield and DIC-ready — built for wafer, chip and FPD defect review.

JM580BD

Key specifications

Stage8-inch platform, 525 × 330 mm, travel 210 × 210 mm
ObservationBrightfield / darkfield / polarized, DIC optional
Objectives5× / 10× / 20× / 50× long WD darkfield
Magnification50×–500× optical
Illumination5 W LED reflected + 10 W LED transmitted
Camera portC-mount 0.65× (1× / 0.5× optional)
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Overview

The JM580BD is built around an 8-inch stage with 210 × 210 mm travel and a quick-release mechanism, so a full wafer can be reviewed without re-clamping. The upright optical path with long working distance objectives leaves room for thick samples and probe fixtures.

Brightfield, darkfield and polarized observation are standard; a Nomarski DIC slider is available for topography and step-height contrast.

Typical applications

Full specification

EyepiecesSWH10×-H/23 mm erect image high-eyepoint (25 mm optional)
ObjectivesInfinity long WD darkfield semi-apochromatic: 5× NA 0.15 WD 14.8, 10× NA 0.30 WD 8.5, 20× NA 0.40 WD 11.9, 50× NA 0.75
Optical magnification50×–500× (50×–1000× with optional 100×)
Digital magnification150×–3000× with 12 MP camera and 22" monitor
Viewing headErect image trinocular, interpupillary 50–76 mm, R:T 100:0 / 50:50
Nosepiece5-position brightfield, DIC slot
FocusingCoaxial coarse/fine, coarse travel 35 mm, fine 0.001 mm
Stage525 × 330 mm, travel 210 × 210 mm, quick-release
PolarizationPolarizer slider, 360° rotating analyzer
Reflected illuminationBF/DF illuminator, aperture and field diaphragm, 5 W LED
Transmitted illumination10 W LED, pre-centred
CondenserSwing-out achromatic NA 0.9
Camera port0.65× (1× / 0.5× optional)
InterferenceNomarski DIC slider (optional)
Imaging options12 MP or 20 MP camera; measurement and stitching software

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