Semiconductor wafer detection is one of the most demanding applications of microscopy in the industrial field: large samples, high precision, no damage, and can also cooperate with the production line process. If the wrong equipment is selected, the efficiency will be low if it is light, and the detection will be missed if it is heavy.
This article explains how to choose a wafer detection microscope, and gives a set of configurations that can be implemented, for the reference of semiconductor, packaging, and material testing related units.
Different processes, different detection targets, different requirements for the microscope:
1. Large working distance + large field of view The wafer cannot be moved casually, and the objective lens should be left with sufficient working distance; the wafer area is large, and the large field of view objective lens is required to reduce the number of splicing.
2. Large travel stage 8-inch wafer diameter 200mm, 12-inch 300mm, ordinary stage is not enough, must be equipped with large travel stage, or even dedicated wafer stage.
3. The lighting method should be all-bright field to see the surface, dark field to see the scratched particles, polarized light to see the stress of the film layer - at least reserve the bright field/dark field, and add polarized light as needed.
4. Scratch resistance and stability The surface of the wafer is extremely sensitive, and the stage, fixture, and focusing should be stable to avoid scratches.
Solution A: Conventional wafer surface inspection (cost-effective)
Upright/Inverted Metallographic Microscope (Infinity Optical System)
Large travel stage (suitable for 6–8 inches)
Industrial camera + image analysis software (defect marking, dimensional measurement)
Research grade Upright metallographic microscope (e.g. 23mm wide field of view optical design)
Expandable coded objective to automatically record magnification and measurement data
Autofocus, Autostitch, Batch Detection Software
In the 8-inch wafer detection scene, the Beijing Zhongke Feilong observation sensor adopts the Jikamo JM580 series material detection metallographic microscope + 8-inch wafer platform solution, which solves the needs of large-size wafer positioning and surface defect observation. The key to such solutions is "large-travel wafer table + stable optical path + digitally recordable software".
If your wafer size is 6–8 inches, the conventional inspection configuration can meet it; 12 inches or those that need automatic splicing, it is recommended to take the motorized stage + customized scheme.
Q1: Do I have to use a metallographic microscope for wafer testing? A: Surface defects, graphics, and film layer observation are commonly used for positive metallography; large parts or available inversions that need to be observed from below; macroscopic preliminary inspection and packaging inspection can be used for stereomicroscopy. Select the morphology according to the detection target.
Q2: Should the 8-inch wafer table be equipped separately? A: The common stage travel is not enough, and a special large-travel stage/wafer stage is required. When selecting the type, make sure that the travel covers the wafer diameter.
Q3: Can I do automatic detection/automatic stitching? A: Yes, electric stage + autofocus + splicing software is required, which is a customized solution. When purchasing, explain the rhythm and accuracy requirements.
Q4: Can the test data be exported? A: With professional image analysis software, defect marking, dimensional measurement, and report export can be performed, and whether the software function is included or not can be confirmed at the time of purchase.
The selection core of the wafer detection microscope is three points: what to see (defects/graphics/film→ layer) and what to use (large field of view/large travel→/illumination) (manual/electric/automated).
Need to evaluate the program, welcome to provide wafer size, detection target, tempo requirements, instrument card ink optical can provide prototype demonstration and custom configuration suggestions.
📞 13338661226/13338661291 ✉️ | 🔗 sales@yikmo.com Related Reading: JM435 Research Grade Metallographic Microscope | How to Choose a Metallographic Microscope | Numerical Aperture NA and Resolution | Customer Cases
Tell us the material, the feature you need to see and the magnification range. We will recommend a configuration and quote it.
